Lithography-aware layout compaction

Curtis Andrus, Matthew R. Guthaus. Lithography-aware layout compaction. In Erik Brunvard, Ken Stevens, Joseph R. Cavallaro, Tong Zhang 0002, editors, Great Lakes Symposium on VLSI 2012, GLSVLSI'12, Salt Lake Cit, UT, USA, May 3-4, 2012. pages 147-152, ACM, 2012. [doi]

Abstract

Abstract is missing.