Jun Du, Zhengying Wei, Wei He, Yiping Tang. Numerical analysis of impact of imprinting pressure on profile shape and mold deformation in UV-NIL. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 792-795, IEEE, 2011. [doi]
Abstract is missing.