Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature

Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino. Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature. Science in China Series F: Information Sciences, 55(4):951-955, 2012. [doi]

Abstract

Abstract is missing.