Jesus A. Jimenez, Alexander Grosser, Charitha Adikaram, Victoria Davila, Robert Wright, Michael Bell. AMHS factors enabling small wafer lot manufacturing in semiconductor wafer fabs. In Proceedings of the 2010 Winter Simulation Conference, WSC 2010, Baltimore, Maryland, USA, 5-8 December 2010. pages 2575-2585, WSC, 2010. [doi]
Abstract is missing.