Vishwanath Natarajan, Soumendu Bhattacharya, Abhijit Chatterjee. Alternate Electrical Tests for Extracting Mechanical Parameters of MEMS Accelerometer Sensors. In 24th IEEE VLSI Test Symposium (VTS 2006), 30 April - 4 May 2006, Berkeley, California, USA. pages 192-199, IEEE Computer Society, 2006. [doi]
Abstract is missing.