Position feedback control of electrostatically controlled linear actuator system

Tuan-Anh Nguyen, Satoshi Konishi. Position feedback control of electrostatically controlled linear actuator system. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, Nagoya, Japan, November 10-13, 2013. pages 1-5, IEEE, 2013. [doi]

Abstract

Abstract is missing.