Scheduling Semiconductor Wafer Fabrication with Optimization of Multiple objectives

Zuntong Wang, Fei Qiao, Qidi Wu. Scheduling Semiconductor Wafer Fabrication with Optimization of Multiple objectives. In 2006 IEEE International Conference on Automation Science and Engineering, Shanghai, China, 7-10 October 2006. pages 253-258, IEEE, 2006. [doi]

Abstract

Abstract is missing.