Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review

Changtao Wang, Wei Zhang, Zeyu Zhao, Yanqin Wang, Ping Gao, Yunfei Luo, Xiangang Luo. Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review. Micromachines, 7(7):118, 2016. [doi]

Abstract

Abstract is missing.