Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration

Qiu Xu, Zhuo-qing Yang, Bo Fu, Yan-Ping Bao, Hao Wu, Yun-Na Sun, Mengyuan Zhao, Jian Li, Guifu Ding, Xiao-Lin Zhao. Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration. Sensors, 17(3):527, 2017. [doi]

Abstract

Abstract is missing.