Guenther Benstetter - researchr alias

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Viewing Publication 1 - 10 from 10

2017

Protective nanometer films for reliable Cu-Cu connectionsTobias Berthold, Guenther Benstetter, Werner Frammelsberger, Manuel Bogner, Rosana Rodríguez, Montserrat Nafría. mr, 76:383-389, 2017. [doi]

2010

Intermittent-contact capacitance spectroscopy - A new method for determining C(V) curves with sub-micron lateral resolutionRoland Biberger, Guenther Benstetter, Holger Goebel, Alexander Hofer. mr, 50(9-11):1511-1513, 2010. [doi]

2009

Displacement current sensor for contact and intermittent contact scanning capacitance microscopyRoland Biberger, Guenther Benstetter, Holger Goebel. mr, 49(9-11):1192-1195, 2009. [doi]

2008

Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profilingRoland Biberger, Guenther Benstetter, Thomas Schweinboeck, Peter Breitschopf, Holger Goebel. mr, 48(8-9):1339-1342, 2008. [doi]

2007

Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFMM. Lanza, M. Porti, M. Nafría, Guenther Benstetter, Werner Frammelsberger, H. Ranzinger, E. Lodermeier, G. Jaschke. mr, 47(9-11):1424-1428, 2007. [doi]

2006

Kelvin probe force microscopy - An appropriate tool for the electrical characterisation of LED heterostructuresW. Bergbauer, T. Lutz, Werner Frammelsberger, Guenther Benstetter. mr, 46(9-11):1736-1740, 2006. [doi]

2005

Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profilingPeter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger. mr, 45(9-11):1568-1571, 2005. [doi]

2003

Characterization of thin and ultra-thin SiO::2:: films and SiO::2::/Si interfaces with combined conducting and topographic atomic force microscopyWerner Frammelsberger, Guenther Benstetter, Thomas Schweinboeck, Richard J. Stamp, Janice Kiely. mr, 43(9-11):1465-1470, 2003. [doi]

A review of ULSI failure analysis techniques for DRAMs. Part II: Defect isolation and visualizationMichael W. Ruprecht, Guenther Benstetter, Douglas B. Hunt. mr, 43(1):17-41, 2003. [doi]

2002

A review of ULSI failure analysis techniques for DRAMs 1. Defect localization and verificationGuenther Benstetter, Michael W. Ruprecht, Douglas B. Hunt. mr, 42(3):307-316, 2002. [doi]

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