A robust approach for process variation aware mask optimization

Jian Kuang 0001, Wing-Kai Chow, Evangeline F. Y. Young. A robust approach for process variation aware mask optimization. In Wolfgang Nebel, David Atienza, editors, Proceedings of the 2015 Design, Automation & Test in Europe Conference & Exhibition, DATE 2015, Grenoble, France, March 9-13, 2015. pages 1591-1594, ACM, 2015. [doi]

Abstract

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