Chengxiang Wang 0005, Yunbin Kuang, Yulie Wu, Zhanqiang Hou, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao. Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1888-1892, IEEE, 2021. [doi]
Abstract is missing.