G. S. Abarca-Jimenez, Mario Alfredo Reyes-Barranca, Salvador Mendoza-Acevedo. MEMS capacitive sensor using FGMOS. In 10th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2013, Mexico City, Mexico, September 30 - October 4, 2013. pages 421-426, IEEE, 2013. [doi]
Abstract is missing.