Thin Silicon Structures Fabrication By Wet Anisotropic Etching

Ajay Agarwal, Xiao-Lin Zhang, Terence Gan, Janak Singh. Thin Silicon Structures Fabrication By Wet Anisotropic Etching. International Journal of Computational Engineering Science, 4(2):311-314, 2003. [doi]

Authors

Ajay Agarwal

This author has not been identified. Look up 'Ajay Agarwal' in Google

Xiao-Lin Zhang

This author has not been identified. Look up 'Xiao-Lin Zhang' in Google

Terence Gan

This author has not been identified. Look up 'Terence Gan' in Google

Janak Singh

This author has not been identified. Look up 'Janak Singh' in Google