Nouha Alcheikh, Lakshmoji Kosuru, Syed N. R. Kazmi, Mohammad I. Younis. In-Plane Air Damping of NEMS and MEMS Resonators. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 225-228, IEEE, 2018. [doi]
Abstract is missing.