Influence of the SiO::2:: layer thickness on the degradation of HfO::2::/SiO::2:: stacks subjected to static and dynamic stress conditions

E. Amat, R. Rodríguez, M. Nafría, X. Aymerich, James H. Stathis. Influence of the SiO::2:: layer thickness on the degradation of HfO::2::/SiO::2:: stacks subjected to static and dynamic stress conditions. Microelectronics Reliability, 47(4-5):544-547, 2007. [doi]

@article{AmatRNAS07,
  title = {Influence of the SiO::2:: layer thickness on the degradation of HfO::2::/SiO::2:: stacks subjected to static and dynamic stress conditions},
  author = {E. Amat and R. Rodríguez and M. Nafría and X. Aymerich and James H. Stathis},
  year = {2007},
  doi = {10.1016/j.microrel.2007.01.003},
  url = {http://dx.doi.org/10.1016/j.microrel.2007.01.003},
  researchr = {https://researchr.org/publication/AmatRNAS07},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {47},
  number = {4-5},
  pages = {544-547},
}