Slavko Amon, Danilo Vrtacnik, Drago Resnik, Matej Mozek, Uros Aljancic, Borut Pecar. Silicon microstructures: Fabrication and application. In MIPRO, 2011 Proceedings of the 34th International Convention, Opatija, Croatia, 23-27 May, 2011. pages 7-16, IEEE, 2011. [doi]
Abstract is missing.