Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Nuria Barniol, Marc A. F. van den Boogaart, Juergen Brugger, Francesc Pérez-Murano. Nanomechanical mass sensor for monitoring deposition rates through confined apertures. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 94-97, IEEE, 2009. [doi]
Abstract is missing.