High-resolution SILC measurements of thin SiO::2:: at ultra low voltages

S. Aresu, Ward De Ceuninck, R. Dreesen, K. Croes, E. Andries, J. Manca, Luc De Schepper, Robin Degraeve, Ben Kaczer, Marc D Olieslaeger. High-resolution SILC measurements of thin SiO::2:: at ultra low voltages. Microelectronics Reliability, 42(9-11):1485-1489, 2002. [doi]