A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model

Ahmed Awad, Atsushi Takahashi 0001, Chikaaki Kodama. A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model. IEICE Transactions, 99-A(12):2363-2374, 2016. [doi]

Abstract

Abstract is missing.