Benefit of Al2O3/HfO2 bilayer for BEOL RRAM integration through 16kb memory cut characterization

M. Azzaz, A. Benoist, Elisa Vianello, Daniele Garbin, E. Jalaguier, Carlo Cagli, C. Charpin, Stefania Bernasconi, S. Jeannot, T. Dewolf, G. Audoit, C. Guedj, S. Denorme, Philippe Candelier, Claire Fenouillet-BĂ©ranger, Luca Perniola. Benefit of Al2O3/HfO2 bilayer for BEOL RRAM integration through 16kb memory cut characterization. In 45th European Solid State Device Research Conference, ESSDERC 2015, Graz, Austria, September 14-18, 2015. pages 266-269, IEEE, 2015. [doi]

Abstract

Abstract is missing.