Sugato Bagchi, Ching-Hua Chen-Ritzo, Sameer T. Shikalgar, Michael Toner. A full-factory simulator as a daily decision-support tool for 300MM wafer fabrication productivity. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2021-2029, WSC, 2008. [doi]
Abstract is missing.