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Shayak Banerjee, Kanak B. Agarwal, Sani R. Nassif. Design-aware lithography. In Jiang Hu, Cheng-Kok Koh, editors, International Symposium on Physical Design, ISPD'12, Napa, CA, USA, March 25-28, 2012. pages 3-8, ACM, 2012. [doi]
Abstract is missing.