Francesco Battini, Emilio Volpi, Eleonora Marchetti, Tommaso Cecchini, Francesco Sechi, Luca Fanucci, Ulrich Hofmann. A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror. Microelectronics Journal, 41(11):778-788, 2010. [doi]
Abstract is missing.