Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Marco BaĆ¹, Marco Ferrari 0002, Habiba Begum, Abid Ali, Joshua E.-Y. Lee, Vittorio Ferrari. Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors. Sensors, 20(12):3483, 2020. [doi]

Abstract

Abstract is missing.