Low-PBTS defect-engineered high-mobility metal-oxide BEOL transistors

Bastien Bcltrando, Bruno Coppolelli, Jung-Bae Kim, Yang Ho Bae, Stephen Weeks, Lisa Enman, Ghazal Saheli, Davide Cornigli, Stuart Brinkley, Mark Saly, Luca Larcher, Dong Kil Yim, Milan Pesic. Low-PBTS defect-engineered high-mobility metal-oxide BEOL transistors. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 4, IEEE, 2024. [doi]

Abstract

Abstract is missing.