Edge-induced reliability & performance degradation in STT-MRAM: an etch engineering solution

Simon Van Beek, Siddharth Rao, Shreya Kundu, Woojin Kim, Barry J. O'Sullivan, Stefan Cosemans, Farrukh Yasin, Robert Carpenter, Sebastien Couet, Shamin H. Sharifi, Nico Jossart, Davide Crotti, Gouri Sankar Kar. Edge-induced reliability & performance degradation in STT-MRAM: an etch engineering solution. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-5, IEEE, 2021. [doi]

Abstract

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