Valentina Bello, Atakan B. Ari, M. Selim Hanay, Kamil L. Ekinci. Measurement and Characterization of Nano-Electro-Mechanical Systems Using Laser Interferometry. In 2020 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2020, Dubrovnik, Croatia, May 25-28, 2020. pages 1-5, IEEE, 2020. [doi]
Abstract is missing.