High Accuracy Micro-Displacement Sensor With Integrated Optics-based Detection Means

Yves Bellouard, Ali A. Said, Mark Dugan, Philippe Bado. High Accuracy Micro-Displacement Sensor With Integrated Optics-based Detection Means. In Proceedings of the 2005 IEEE International Conference on Robotics and Automation, ICRA 2005, April 18-22, 2005, Barcelona, Spain. pages 850-854, IEEE, 2005.