Large area recrystallization of thick polysilicon films for low cost partial SOI power devices

I. Bertrand, Jean-Marie Dilhac, P. Renaud, Christian Ganibal. Large area recrystallization of thick polysilicon films for low cost partial SOI power devices. Microelectronics Journal, 37(3):257-261, 2006. [doi]

Abstract

Abstract is missing.