Sachin Bhat, Sounak Shaun Ghosh, Sourabh Kulkarni, Mingyu Li, Csaba Andras Moritz. A Wafer-scale Manufacturing Pathway for Fine-grained Vertical 3D-IC Technology. In 22nd International Symposium on Quality Electronic Design, ISQED 2021, Santa Clara, CA, USA, April 7-9, 2021. pages 228-233, IEEE, 2021. [doi]
Abstract is missing.