Parameter-oriented reduction strategies for a thermo-mechanical model of extreme ultraviolet reticles

Can Bikcora, Siep Weiland. Parameter-oriented reduction strategies for a thermo-mechanical model of extreme ultraviolet reticles. In 2016 IEEE Conference on Control Applications, CCA 2016, Buenos Aires, Argentina, September 19-22, 2016. pages 1149-1154, IEEE, 2016. [doi]

Abstract

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