Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling

Peter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger. Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling. Microelectronics Reliability, 45(9-11):1568-1571, 2005. [doi]

Abstract

Abstract is missing.