Eric Bruls, F. Camerik, H. J. Kretschman, Jochen A. G. Jess. A Generic Method to Develop a Defect Monitoring System for IC Processes. In Proceedings IEEE International Test Conference 1991, Test: Faster, Better, Sooner, Nashville, TN, USA, October 26-30, 1991. pages 218-227, IEEE Computer Society, 1991.
Abstract is missing.