GaN nanodot fabrication by implant source growth

R. Buckmaster, J. H. Yoo, K. Shin, Y. Yao, T. Sekiguchi, M. Yokoyama, T. Hanada, T. Goto, M. Cho, Y. Kawazoe. GaN nanodot fabrication by implant source growth. Microelectronics Journal, 36(3-6):456-459, 2005. [doi]

Abstract

Abstract is missing.