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GaN nanodot fabrication by implant source growth

R. Buckmaster, J. H. Yoo, K. Shin, Y. Yao, T. Sekiguchi, M. Yokoyama, T. Hanada, T. Goto, M. Cho, Y. Kawazoe. GaN nanodot fabrication by implant source growth. Microelectronics Journal, 36(3-6):456-459, 2005. [doi]

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R. Buckmaster

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J. H. Yoo

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K. Shin

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Y. Yao

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T. Sekiguchi

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M. Yokoyama

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T. Hanada

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T. Goto

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M. Cho

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Y. Kawazoe

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