Erik Bury, Adrian Chasin, Ben Kaczer, Michiel Vandemaele, Stanislav Tyaginov, Jacopo Franco, Romain Ritzenthaler, Hans Mertens, Pieter Weckx, N. Horiguchi, Dimitri Linten. Evaluating Forksheet FET Reliability Concerns by Experimental Comparison with Co-integrated Nanosheets. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 5, IEEE, 2022. [doi]
Abstract is missing.