Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations - researchr publication authors

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Erik Bury, Ben Kaczer, Simon Van Beek, D. Lintern. Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations. In 48th European Solid-State Device Research Conference, ESSDERC 2018, Dresden, Germany, September 3-6, 2018. pages 186-189, IEEE, 2018. [doi]

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