Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations

Erik Bury, Ben Kaczer, Simon Van Beek, D. Lintern. Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations. In 48th European Solid-State Device Research Conference, ESSDERC 2018, Dresden, Germany, September 3-6, 2018. pages 186-189, IEEE, 2018. [doi]

@inproceedings{BuryKBL18,
  title = {Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations},
  author = {Erik Bury and Ben Kaczer and Simon Van Beek and D. Lintern},
  year = {2018},
  doi = {10.1109/ESSDERC.2018.8486872},
  url = {https://doi.org/10.1109/ESSDERC.2018.8486872},
  researchr = {https://researchr.org/publication/BuryKBL18},
  cites = {0},
  citedby = {0},
  pages = {186-189},
  booktitle = {48th European Solid-State Device Research Conference, ESSDERC 2018, Dresden, Germany, September 3-6, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-5401-9},
}