Characterization of photonic devices by secondary electron potential contrast

Marco Buzzo, Mauro Ciappa, Wolfgang Fichtner. Characterization of photonic devices by secondary electron potential contrast. Microelectronics Reliability, 46(9-11):1536-1541, 2006. [doi]

@article{BuzzoCF06,
  title = {Characterization of photonic devices by secondary electron potential contrast},
  author = {Marco Buzzo and Mauro Ciappa and Wolfgang Fichtner},
  year = {2006},
  doi = {10.1016/j.microrel.2006.07.016},
  url = {http://dx.doi.org/10.1016/j.microrel.2006.07.016},
  researchr = {https://researchr.org/publication/BuzzoCF06},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {46},
  number = {9-11},
  pages = {1536-1541},
}