+N Junction by Scanning Capacitance and Scanning Electron Microscopy

Marco Buzzo, Markus Leicht, Thomas Schweinböck, Mauro Ciappa, Maria Stangoni, Wolfgang Fichtner. +N Junction by Scanning Capacitance and Scanning Electron Microscopy. Microelectronics Reliability, 44(9-11):1681-1686, 2004. [doi]

@article{BuzzoLSCSF04,
  title = {+N Junction by Scanning Capacitance and Scanning Electron Microscopy},
  author = {Marco Buzzo and Markus Leicht and Thomas Schweinböck and Mauro Ciappa and Maria Stangoni and Wolfgang Fichtner},
  year = {2004},
  doi = {10.1016/j.microrel.2004.07.053},
  url = {http://dx.doi.org/10.1016/j.microrel.2004.07.053},
  researchr = {https://researchr.org/publication/BuzzoLSCSF04},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {44},
  number = {9-11},
  pages = {1681-1686},
}