+N Junction by Scanning Capacitance and Scanning Electron Microscopy

Marco Buzzo, Markus Leicht, Thomas Schweinböck, Mauro Ciappa, Maria Stangoni, Wolfgang Fichtner. +N Junction by Scanning Capacitance and Scanning Electron Microscopy. Microelectronics Reliability, 44(9-11):1681-1686, 2004. [doi]

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