An analysis of tool capabilities in the photolithography area of an ASIC fab

P. J. Byrne, Cathal Heavey, Kamil Erkan Kabak. An analysis of tool capabilities in the photolithography area of an ASIC fab. In Shane G. Henderson, Bahar Biller, Ming-Hua Hsieh, John Shortle, Jeffrey D. Tew, Russell R. Barton, editors, Proceedings of the Winter Simulation Conference, WSC 2007, Washington, DC, USA, December 9-12, 2007. pages 1761-1767, WSC, 2007. [doi]

Abstract

Abstract is missing.