Influence of Punch Trough Stop Layer and Well Depths on the Robustness of Bulk FinFETs to Heavy Ions Impact

Antonio Calomarde, Salvador Manich, Antonio Rubio, Francisco Gámiz. Influence of Punch Trough Stop Layer and Well Depths on the Robustness of Bulk FinFETs to Heavy Ions Impact. IEEE Access, 10:47169-47178, 2022. [doi]

Abstract

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