Chun-Ming Chang, Ming-Hua Shiao, Donyau Chiang, Mao-Jung Huang, Chin-Tien Yang, Wen-Jeng Hsueh. Surface property study of different patterning sapphire structures by ICP-RIE. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 372-375, IEEE, 2013. [doi]
Abstract is missing.