Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

Honglong Chang, Qiang Shen, Zhiguang Zhou, Jianbing Xie, Qinghua Jiang, Weizheng Yuan. Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit. Sensors, 10(4):3835-3856, 2010. [doi]

Abstract

Abstract is missing.