Fabrication of Molybdenum MEMs Structures Using Dry and Wet Etching

Sandeep Singh Chauhan, Niharika J, M. M. Joglekar, S. K. Manhas. Fabrication of Molybdenum MEMs Structures Using Dry and Wet Etching. In S. Rajaram, N. B. Balamurugan, D. Gracia Nirmala Rani, Virendra Singh, editors, VLSI Design and Test - 22nd International Symposium, VDAT 2018, Madurai, India, June 28-30, 2018, Revised Selected Papers. Volume 892 of Communications in Computer and Information Science, pages 254-263, Springer, 2018. [doi]

Abstract

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