Composite Phase-Shifting and Height Fusion Algorithm With Vibration-Robust in White Light Interferometry

Ruikun Chen, Jian Gao 0002, Zhuojun Zheng, Lanyu Zhang, Junwen Tan. Composite Phase-Shifting and Height Fusion Algorithm With Vibration-Robust in White Light Interferometry. IEEE T. Instrumentation and Measurement, 74:1-9, 2025. [doi]

Abstract

Abstract is missing.