A MEMS based sensor for large scale force measurement

Weihai Chen, Jun Jiang, Jingmeng Liu, Wenjie Chen. A MEMS based sensor for large scale force measurement. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 1278-1283, IEEE, 2013. [doi]

Abstract

Abstract is missing.