Zeji Chen, Qianqian Jia, Wenli Liu, Yinfang Zhu, Quan Yuan, Jinling Yang, Fuhua Yang. A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 455-458, IEEE, 2021. [doi]
Abstract is missing.